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Proceedings Paper

Excimer surface treatment of sol gel coatings
Author(s): Bruno Godard; Sylvie Janicot; Guillaume Lathus; Michel Pealat; Eric Fogarassy
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Paper Abstract

Sol-gel coatings are finding increased applications in fields as diverse as traditional optical coatings (eg anti- and high-reflectance) and microelectronic devices. Following the deposition process heat treatment is required to densify or crystallize the films. The disadvantage of conventional heat treatment, by hot plate or oven, is the limit on temperature and time set either by the thermal stability of the materials or by interactions between film and substrate. A study has been made of the use of excimer lasers for heat treatment of PZT (PbZrO3:PbTiO3) sol-gel films, the main application being pyroelectric detector arrays.

Paper Details

Date Published: 1 February 2000
PDF: 8 pages
Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); doi: 10.1117/12.376972
Show Author Affiliations
Bruno Godard, SOPRA SA (France)
Sylvie Janicot, SOPRA SA (France)
Guillaume Lathus, SOPRA SA (France)
Michel Pealat, SOPRA SA (France)
Eric Fogarassy, CNRS Lab. PHASE (France)

Published in SPIE Proceedings Vol. 3885:
High-Power Laser Ablation II
Claude R. Phipps; Masayuki Niino, Editor(s)

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