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Proceedings Paper

Characterization of laser-produced gas-puff plasmas for soft x-ray projection lithography
Author(s): Masayuki Suzuki; Hiroyuki Daido; Il Woo Choi; Huajing Tang; Susumu Yamagami; Hideo Nagatomo; Andrzej Bartnik; Henryk Fiedorowicz; Wei Yu; Takeyoshi Nakayama
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Paper Abstract

We characterize a laser produced gas puff plasma for soft x- ray generation. Strong emissions at 11.4 nm wavelength region was observed, using krypton and xenon gas puff targets irradiated by a 0.7J/8ns Nd:YAG laser. Space resolved x-ray spectra measurement indicated that the source size depends on the Rayleigh length and the gas density profile. A channeling effect for larger tare size which is connected with the thermal focusing has been observed.

Paper Details

Date Published: 11 January 2000
PDF: 8 pages
Proc. SPIE 3886, High-Power Lasers in Energy Engineering, (11 January 2000); doi: 10.1117/12.375161
Show Author Affiliations
Masayuki Suzuki, Kinki Univ. (Japan)
Hiroyuki Daido, Institute of Laser Engineering/Osaka Univ. (Japan)
Il Woo Choi, Institute of Laser Engineering/Osaka Univ. (Japan)
Huajing Tang, Institute of Laser Engineering/Osaka Univ. (Japan)
Susumu Yamagami, Institute of Laser Engineering/Osaka Univ. (Japan)
Hideo Nagatomo, Institute of Laser Engineering/Osaka Univ. (Japan)
Andrzej Bartnik, Military Univ. of Technology (Poland)
Henryk Fiedorowicz, Military Univ. of Technology (Poland)
Wei Yu, Shanghai Institute of Optics and Fine Mechanics (China)
Takeyoshi Nakayama, Kinki Univ. (Japan)

Published in SPIE Proceedings Vol. 3886:
High-Power Lasers in Energy Engineering
Kunioki Mima; Gerald L. Kulcinski; William J. Hogan, Editor(s)

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