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Proceedings Paper

Application of fiber optic sensors to wastewater management using microelectronics fabrication processes
Author(s): Dumitru Gh. Ulieru
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Paper Abstract

The concept of waste water treatment from microelectronics fab. Processes is referring to waste water discharged from ultrapure water plant which can't be treated on recovery waste water section. These wastes concentrated contains organic and inorganic acids, alkalis, metals, cyanide, chromium and fluoride effluent from fab. processes. They will be canalized on qualities for treatment sections which permit the discharge of treated waste water as neutral with solids removal as compacted sludge. For management of waste water treatment plant we are using the fiber optic sensors as follows: level and flow control, signalization automatic pumps control and protection, solid control, leak detection a.s.o. The neutral quality of treated water has 'null' impact against of environmental system recommended for all semiconductors and microelectronics fab. processes.

Paper Details

Date Published: 9 December 1999
PDF: 10 pages
Proc. SPIE 3860, Fiber Optic Sensor Technology and Applications, (9 December 1999); doi: 10.1117/12.372965
Show Author Affiliations
Dumitru Gh. Ulieru, Romes S.A. (Romania)

Published in SPIE Proceedings Vol. 3860:
Fiber Optic Sensor Technology and Applications
Michael A. Marcus; Brian Culshaw, Editor(s)

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