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Proceedings Paper

EUV spectroscopy of ultrafast capillary discharges
Author(s): Larry V. Knight; R. Steven Turley; Chris Crawford; Derek Hullinger; Alexander P. Shevelko; Oleg F. Yakushev; Richard Miller
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Paper Abstract

The observation of EUV spectra of multiply charged ions excited by an ultrafast capillary discharge suggest the possibility of developing an intense compact source of soft x- ray and EUV radiation for practical applications (EUV lithography, microscopy, etc.). The discharge is driven by a compact water transmission line having a very fast current pulse (12 ns FHWM, rise time approximately 1 ns). Spectra of OV-OVI ions from a polyacetal capillary and ArVII-ArVIII ions from an Ar filled capillary were observed and investigated in a spectral range of 100 - 300 Angstrom using a 1-m grazing incidence spectrograph. The resulting capillary discharge plasmas have an electron temperature of approximately 25 - 35 eV, which could be increased to approximately 100 eV using a more powerful transmission line.

Paper Details

Date Published: 23 November 1999
PDF: 5 pages
Proc. SPIE 3767, EUV, X-Ray, and Neutron Optics and Sources, (23 November 1999); doi: 10.1117/12.371139
Show Author Affiliations
Larry V. Knight, Brigham Young Univ. (United States)
R. Steven Turley, Brigham Young Univ. (United States)
Chris Crawford, Brigham Young Univ. (United States)
Derek Hullinger, Brigham Young Univ. (United States)
Alexander P. Shevelko, P.N. Lebedev Physical Institute (Russia)
Oleg F. Yakushev, P.N. Lebedev Physical Institute (Russia)
Richard Miller, Maxwell Technologies Inc. (United States)

Published in SPIE Proceedings Vol. 3767:
EUV, X-Ray, and Neutron Optics and Sources
Carolyn A. MacDonald; Kenneth A. Goldberg; Juan R. Maldonado; Huaiyu Heather Chen-Mayer; Stephen P. Vernon, Editor(s)

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