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Proceedings Paper

Characteristics of sol-gel-derived (Pb,Ca)TiO3 pyroelectric thin films
Author(s): Chih-Ming Wang; Ying-Chung Chen; Yao-Te Huang; Ming-Cheng Kao
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Paper Abstract

Polycrystalline thin films of Ca-modified lead titanate (PCT) were deposited on Pt/SiO2/Si substrates using a diol-based sol-gel process. Calcium acetylacetonate hydrate was adopted as a starting material instead of calcium acetate or calcium nitrate tetra-hydrate used in general. By changing the Ca content and heating temperature, the influences of various processing parameters on the characteristics of thin films are studied. With the increase of Ca content, the relative dielectric constant of PCT thin film increases from 43 up to 70 at the heating temperature of 700°C. It was found that the coercive field and the remanent polarization decreased, but the pyroelectric coefficient increased with an increase of Ca content. The results show that PCT thin film exhibits the largest figures of merit for the voltage responsivity and the specific detectivity at heating temperature of 700°C and Ca content of 25 mol%.

Paper Details

Date Published: 12 November 1999
PDF: 10 pages
Proc. SPIE 3896, Design, Fabrication, and Characterization of Photonic Devices, (12 November 1999); doi: 10.1117/12.370384
Show Author Affiliations
Chih-Ming Wang, National Sun Yat-Sen Univ. (Taiwan)
Ying-Chung Chen, National Sun Yat-Sen Univ. (Taiwan)
Yao-Te Huang, National Sun Yat-Sen Univ. (Taiwan)
Ming-Cheng Kao, National Sun Yat-Sen Univ. (Taiwan)

Published in SPIE Proceedings Vol. 3896:
Design, Fabrication, and Characterization of Photonic Devices
Marek Osinski; Soo-Jin Chua; Shigefusa F. Chichibu, Editor(s)

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