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Proceedings Paper

Dependence of cracking behavior of sol-gel films on symmetries of substrates
Author(s): Shi De Cheng; Yan Zhou; Chan Hin Kam; Wenxiu Que; Yee Loy Lam; Yuen Chuen Chan; Woon Siong Gan
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Paper Abstract

The cracking of sol-gel derived films on Si(100), Si(111), and glass substrates has been studied experimentally using optical microscopy, scanning electron microscopy and optical scattering method, as well as theoretically using the static method and the dynamic method. The experimental observations show that the primary cracking directions of the sol-gel derived film depend strongly on the symmetry of the substrate. As all the studied substrates have a uniform biaxial elastic modulus, the static method cannot explain such cracking behavior. However, the most probably directions of the primary cracks can be determined by considering the anisotropy of the longitudinal and the transversal elastic waves, and these directions are in good agreement with the experimental observations.

Paper Details

Date Published: 12 November 1999
PDF: 7 pages
Proc. SPIE 3896, Design, Fabrication, and Characterization of Photonic Devices, (12 November 1999); doi: 10.1117/12.370383
Show Author Affiliations
Shi De Cheng, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)
Chan Hin Kam, Nanyang Technological Univ. (Singapore)
Wenxiu Que, Nanyang Technological Univ. (Singapore)
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Woon Siong Gan, Acoustical Technologies Singapore Pte. Ltd. (Singapore)

Published in SPIE Proceedings Vol. 3896:
Design, Fabrication, and Characterization of Photonic Devices
Marek Osinski; Soo-Jin Chua; Shigefusa F. Chichibu, Editor(s)

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