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Proceedings Paper

Electron-beam-induced emission of electrons from insulators
Author(s): Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield
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Paper Abstract

Under e-beam irradiation of insulators the introduced electron charge is accumulated in the material. As a result an electric field appears and increases with time causing parasitic deflection of the beam and decrease of the energy of incident electrons. This general problem creates seemingly insuperable obstacles to the e-beam processing and electron microscopy of insulators. However the presented extended study of the physical processes accompanying electron irradiation of insulators has allowed to find the ways around this problem, especially of the case of e-beam engraving studied with full details.

Paper Details

Date Published: 15 November 1999
PDF: 9 pages
Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); doi: 10.1117/12.370118
Show Author Affiliations
Anatoly M. Filachev, Scientific and Research Institute of Electron and Ion Optics (Russia)
Boris I. Fouks, Institute of Radioengineering and Electronics (Russia)
Dmitrii E. Greenfield, Scientific and Research Institute of Electron and Ion Optics (Russia)

Published in SPIE Proceedings Vol. 3777:
Charged Particle Optics IV
Eric Munro, Editor(s)

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