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Proceedings Paper

Frequency shift analysis for comb drive structures
Author(s): S. Pandari Nath; Rudra Pratap
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Paper Abstract

A sensor's frequency response range and its sensitivity mainly depend on the stiffness and the natural frequency distribution of the sensing structure. Both the parameters, stiffness and naturally frequency distribution, can be changed by varying the geometric configuration of the sensing structure. This paper present a frequency shift analysis of a typical microstructure used in MEMS. The frequency shift analysis is carried out by changing the geometric configuration of the structure and obtaining the frequency band for different configurations. This work provides a tool to understand the effect of geometric configuration on microsensors characteristics.

Paper Details

Date Published: 9 November 1999
PDF: 11 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369475
Show Author Affiliations
S. Pandari Nath, Indian Institute of Science/Bangalore (India)
Rudra Pratap, Indian Institute of Science/Bangalore (India)

Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)

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