We have designed, fabricated and tested a balanced doubly suspended versatile, torsion and flexural, MEMS resonator structure. The doubly suspended structure has been used earlier for very precise high Q resonators but we wished to study the various vibration modes of such a structure. FEM analysis has been used to compute the most likely 6 modes and their frequencies of free vibration. These modes include flexure, torsion and mixed modes. The arms of the resonator are deposited with magnetic films so as to give desired bending/twisting moments to the structure. The location of the films decides the symmetry and thus result in one of the six vibrational modes that are predicted by the FEM analysis. This paper describes the design, fabrication and measurements on resonator structures made at TIFR.

Date Published: 9 November 1999
PDF: 10 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369473

Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)