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Proceedings Paper

Development of micromachined vibration sensors for MEMS applications
Author(s): Amita Gupta; Ranvir Singh; Vinoy K. Jain; Vikram Kumar
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Paper Abstract

Vibration sensors are an integral part of many microelectromechanical systems (MEMS). Excellent electronic and mechanical properties of Silicon make it the perfect material for developing these sensor. MEMS technology is mainly based on silicon micromachining. A vibration sensor has been developed using bulk micromachining of silicon. The key element here is the suspended seismic mass which forms a spring mass system. Movement of the seismic mass in the presence of vibration is monitored to sensor and control vibration. Various aspects dealing with the development of these devices are discussed in this paper.

Paper Details

Date Published: 9 November 1999
PDF: 9 pages
Proc. SPIE 3903, Indo-Russian Workshop on Micromechanical Systems, (9 November 1999); doi: 10.1117/12.369455
Show Author Affiliations
Amita Gupta, Solid State Physics Lab. (India)
Ranvir Singh, Solid State Physics Lab. (India)
Vinoy K. Jain, Solid State Physics Lab. (India)
Vikram Kumar, Solid State Physics Lab. (India)

Published in SPIE Proceedings Vol. 3903:
Indo-Russian Workshop on Micromechanical Systems
Vladimir I. Pustovoy; Vinoy K. Jain, Editor(s)

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