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Proceedings Paper

Intensity-based fiber optic pressure sensor with an Au/NiCr/Si3N4/SiO2/Si3N4 diaphragm
Author(s): Jaehee Park; Myung Gyoo Kim; Yohee Kim; Kwangsoo Kim; Ilmin Kim
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Paper Abstract

Intensity based fiber optic pressure sensor has been fabricated using micromachining technology. The sensor consists of a multimode fiber bundle and a 100nm-Au/30nm- NiCr/150nm-Si3N4/300nm-SiO2/150nm- Si3N4 diaphragms supported by a micromachined frame-shape silicon substrate. The distance between the fiber bundle and the diaphragm of the pressure sensor is 900 micrometers . Three fiber optic pressure sensor having different size diaphragms were fabricated and used in experiments. The pressure sensitivities were 20.69 nW/kPa, 26.70 nW/kPa, and 39.33 nW/kPa for the pressure sensor with diaphragms of 3 X 3 mm2 area, 4 X 4 mm2 area, and 5 X 5 mm2 area.

Paper Details

Date Published: 11 November 1999
PDF: 5 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369355
Show Author Affiliations
Jaehee Park, Keimyung Univ. (South Korea)
Myung Gyoo Kim, Chungnam National Univ. (South Korea)
Yohee Kim, Korea Electrotechnology Research Inc. (South Korea)
Kwangsoo Kim, Korea Electrotechnology Research Inc. (South Korea)
Ilmin Kim, Hansung Univ. (South Korea)

Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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