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Proceedings Paper

Separate measurement of geometrical thickness and refractive index by an interference confocal microscope
Author(s): Takashi Fukano; Ichirou Yamaguchi
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Paper Abstract

In this paper we first survey non-contacting and separate measurement of thickness and refractive index of a transparent plate or film. Then we describe the separate measurement of refractive index and geometrical index and geometrical thickness of multiple layers which uses a combination of confocal microscopy and low-coherence interferometry. The measurement has been accelerated by replacing the low-coherence interferometry by wavelength- scanning heterodyne interferometry using a laser diode. Finally, accuracy of the measurement has been experimentally studied and display of a cross-sectional image of a stack of glass plates has been demonstrated.

Paper Details

Date Published: 11 November 1999
PDF: 13 pages
Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369325
Show Author Affiliations
Takashi Fukano, RIKEN-The Institute of Physical and Chemical Research (Japan ) and Saitama Univ. (Japan)
Ichirou Yamaguchi, RIKEN-The Institute of Physical and Chemical Research (Japan)

Published in SPIE Proceedings Vol. 3897:
Advanced Photonic Sensors and Applications
Robert A. Lieberman; Anand Krishna Asundi; Hiroshi Asanuma, Editor(s)

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