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Proceedings Paper

3D profilometry based on the white light interferometer for rough surfaces
Author(s): Seok-moon Ryoo; Yeong Kyeong Seong; Tae-Sun Choi
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Paper Abstract

A new approach to 3-D profilometry for the white light interferometer is presented. Recently many different methods have been used to analyze the data obtained from white light interferometric profilers. The advantage of the interferometric methods is their precision that can reach a small fraction of a wavelength. But these profilers are usually limited to relatively smooth surfaces as well as being very expensive. We detail a simple way to construct a profiler that uses a simple and efficient algorithm. It treats the data in a fast and simple manner, thus reducing both the acquisition and the analysis time. The method is based on the Focus measurement that finds a maximum variance value. The method works well with rough surfaces.

Paper Details

Date Published: 11 November 1999
PDF: 8 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369215
Show Author Affiliations
Seok-moon Ryoo, Kwangju Institute of Science and Technology (South Korea)
Yeong Kyeong Seong, Kwangju Institute of Science and Technology (South Korea)
Tae-Sun Choi, Kwangju Institute of Science and Technology (South Korea)

Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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