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Proceedings Paper

Noncontact estimate of grinding-induced subsurface damage
Author(s): John C. Lambropoulos; Yi Li; Paul D. Funkenbusch; Jeffrey L. Ruckman
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Paper Abstract

We review extensive data on measured subsurface damage and surface roughness resulting from lapping (loose abrasive grinding under fixed nominal pressure) and deterministic microgrinding (bound abrasive grinding under fixed nominal infeed) of commercial optical glasses with a large range of abrasive sizes. Subsurface damage is measured with the dimple method and related techniques. Surface roughness is measured with white light interferometry. Our results show that subsurface damage and its statistical scatter can both be estimated directly from the non-contact measurement of peak- valley surface roughness.

Paper Details

Date Published: 11 November 1999
PDF: 10 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369213
Show Author Affiliations
John C. Lambropoulos, Univ. of Rochester (United States)
Yi Li, Univ. of Rochester (United States)
Paul D. Funkenbusch, Univ. of Rochester (United States)
Jeffrey L. Ruckman, Univ. of Rochester (United States)

Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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