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Proceedings Paper

Novel scanning technique for ultraprecise measurement of topography
Author(s): Ingolf Weingaertner; Michael Schulz; Clemens Elster
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Paper Abstract

The ultra-precise manufacturing of surfaces needs ultra- precise characterization. A novel optical scanning technique for testing flats, aspheres and complex surfaces is presented which offers ultra-precision for the measurement of slope and topography. The scanning technique needs no external references; it is traced back exclusively to the units of angle and length. The technique is based on a combination of two principles, namely to perform difference measurements for slopes with large shears and to use only a single pentagon prism for the difference measurements, keeping the angular position of the pentagon prism constant in space. The combination of these two principles eliminates the influences of all first- and second-order errors of the facility. Whole- body movement of the artefact under test and distortion of the facility itself do not result in errors.

Paper Details

Date Published: 11 November 1999
PDF: 12 pages
Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); doi: 10.1117/12.369198
Show Author Affiliations
Ingolf Weingaertner, Physikalisch-Technische Bundesanstalt (Germany)
Michael Schulz, Physikalisch-Technische Bundesanstalt (Germany)
Clemens Elster, Physikalisch-Technische Bundesanstalt (Germany)

Published in SPIE Proceedings Vol. 3782:
Optical Manufacturing and Testing III
H. Philip Stahl, Editor(s)

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