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Proceedings Paper

Nanolithography by tip-enhanced laser irradiation
Author(s): ZhiHong Mai; Yongfeng Lu; Wen Dong Song; Wai Kin Chim
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Paper Abstract

Recently, scanning probe lithography by applying an electric field between the tip and the sample has been shown to be a promising technique for nanofabrication. In this paper, we present a novel method of nanofabrication, namely, nanolithography by tip-enhanced laser irradiation. Based on the operation of the laser-assisted scanning tunneling microscope (STM), we established a nanolithography system using tip-enhanced laser irradiation, which was developed from a commercial scanning probe microscope (SPM). In our investigation, the SPM was operated as an STM. During imagin and lithography, the STM is in a constant current mode. The tip is fixed and the sample moves via a tube scanner. Nanolithography software controls the scanner movement in the x and y direction. The SPM has an open architecture, allowing an external laser beam incident on the tip at an incident angle between 0 to 45 degrees. A vertical polarized Nd:YAG pulsed laser with a pulse duration of 7 ns was focused on the surfaces of the tip and the sample. An electrical shutter was introduced to switch the laser irradiation during lithography. Alignment of the laser to the tip-sample gap was performed under a high power charge coupled device microscope. Nanolithography was performed on hydrogen (H)-passivated Si (100) surfaces and H-passivated Ge (100) surface.s The Si samples and the Ge samples were passivated in HF solution. STM tips were homemade electrochemically form a 0.5-mm tungsten wire. Oxide features were created by tip-enhanced laser irradiation. The experimental result will be discussed.

Paper Details

Date Published: 4 November 1999
PDF: 8 pages
Proc. SPIE 3898, Photonic Systems and Applications in Defense and Manufacturing, (4 November 1999); doi: 10.1117/12.368476
Show Author Affiliations
ZhiHong Mai, National Univ. of Singapore (Singapore)
Yongfeng Lu, National Univ. of Singapore (United States)
Wen Dong Song, National Univ. of Singapore (Singapore)
Wai Kin Chim, National Univ. of Singapore (Singapore)

Published in SPIE Proceedings Vol. 3898:
Photonic Systems and Applications in Defense and Manufacturing
Yee Loy Lam; Koji Ikuta; Metin S. Mangir, Editor(s)

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