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Proceedings Paper

Design and simulation of a micromirror array for a projection TV
Author(s): Bumkyoo Choi; Junghoon Lee; Kyuwon Jung; Hyungjae Shin
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Paper Abstract

The design of a micromirror for a projection TV is investigated. A static structural analysis is performed to give an optimal shape of the micromirror using the FEM commercial package, ANSYS. A solid modeling is created, and mapped meshes are applied to it in order to satisfy a symmetric condition. A stress analysis shows that maximum stress does not exceed an allowable stress, which is the yield strength. A modal analysis is also executed to find the approximate natural frequencies with different design parameters. The result can be utilized to see which design parameter is strongly dominant. The micromirror was fabricated by Samsung Electronics. Dynamic deflection experiments confirm the results of the simulation.

Paper Details

Date Published: 8 October 1999
PDF: 8 pages
Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); doi: 10.1117/12.368449
Show Author Affiliations
Bumkyoo Choi, Sogang Univ. (South Korea)
Junghoon Lee, Sogang Univ. (South Korea)
Kyuwon Jung, Sogang Univ. (South Korea)
Hyungjae Shin, Samsung Electronics Co., Ltd. (South Korea)

Published in SPIE Proceedings Vol. 3893:
Design, Characterization, and Packaging for MEMS and Microelectronics
Bernard Courtois; Serge N. Demidenko, Editor(s)

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