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Proceedings Paper

Spectroscopic study of an ablative capillary discharge dedicated to the development of a soft x-ray amplifier
Author(s): Remi Dussart; William E. S. Rosenfeld; Sven Goetze; Dunpin Hong; Christophe Cachoncinlle; Claude Fleurier; Jean-Michel Pouvesle
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Paper Abstract

A fast capillary discharge for intense soft X-ray emission is under investigation for EUV lithography and X-ray laser studies. A high current pulse (60 kA) is driven into a 1 mm diameter polyethylene capillary and creates a highly ionized plasma of carbon produced by wall ablation. Input power density as high as 70 was injected. The X- ray emission is analyzed with a spectrometer efficient from 20 to 450 angstroms. Time resolved spectra are recorded with a gated MCP. A visible spectrometer was used to measure the Stark broadening of the CIV line at 580 nm and to determine the electron density at low input energy. The FLY code was used to evaluate the electron temperature from the intensity ratio of two lines emitting in the same wavelength domain.

Paper Details

Date Published: 21 October 1999
PDF: 6 pages
Proc. SPIE 3776, Soft X-Ray Lasers and Applications III, (21 October 1999); doi: 10.1117/12.366667
Show Author Affiliations
Remi Dussart, Univ. d'Orleans (France)
William E. S. Rosenfeld, Univ. d'Orleans (France)
Sven Goetze, Univ. d'Orleans (France)
Dunpin Hong, Univ. d'Orleans (France)
Christophe Cachoncinlle, Univ. d'Orleans (France)
Claude Fleurier, Univ. d'Orleans (France)
Jean-Michel Pouvesle, Univ. d'Orleans (France)

Published in SPIE Proceedings Vol. 3776:
Soft X-Ray Lasers and Applications III
Jorge J. G. Rocca; Luiz Barroca Da Silva, Editor(s)

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