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Proceedings Paper

Fabrication of thin film metallic glass and its application to microactuators
Author(s): Seiichi Hata; Kaiji Sato; Akira Shimokohbe
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Paper Abstract

Metallic glasses are kinds of amorphous alloys. They are free from defects resulting from crystalline structures. Metallic glasses soften in a certain temperature range called the supercooled liquid region, which makes metallic glasses easily be formed into a 3D shape. This paper first describes a fabrication method for a thin film metallic glass (TFMG) using RF magnetron sputtering. Secondly A micro beam of TFMG is introduced. Although the fabricated micro beams bent due to the internal stress caused by stress was related by annealing the beams in the supercooled liquid region, and straight beams were fabricated. Secondly, curved micro beams of TFMG were micro formed by heating the straight beams again into the supercooled liquid state. Finally, a new type electrostatic microactuator of a conical spring shape was made of TFMG. CSLA was capable of stepwise motion vertical to the substrate. The 10 micrometers step height and 30 micrometers total height were realized.

Paper Details

Date Published: 1 October 1999
PDF: 12 pages
Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364504
Show Author Affiliations
Seiichi Hata, Tokyo Institute of Technology (Japan)
Kaiji Sato, Tokyo Institute of Technology (Japan)
Akira Shimokohbe, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 3892:
Device and Process Technologies for MEMS and Microelectronics
Kevin H. Chau; Sima Dimitrijev, Editor(s)

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