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Proceedings Paper

Direct writing of nickel by electrodeposition from various electrolytes
Author(s): Greger Thornell; Anders Jansson; Stefan A. I. Johansson
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Paper Abstract

Direct writing with the help of a sharp microelectrode in close vicinity of a conducting substrate in an aqueous metal salt electrolyte is possible by consistently adjusting the gap between the electrode and the growing structure to maintaining an applied voltage, or the resulting electric field.

Paper Details

Date Published: 1 October 1999
PDF: 10 pages
Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364480
Show Author Affiliations
Greger Thornell, Uppsala Univ. (Sweden)
Anders Jansson, Uppsala Univ. (Sweden)
Stefan A. I. Johansson, Uppsala Univ. (Sweden)

Published in SPIE Proceedings Vol. 3892:
Device and Process Technologies for MEMS and Microelectronics
Kevin H. Chau; Sima Dimitrijev, Editor(s)

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