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Proceedings Paper

Novel micropump actuated by thin film shape memory alloy
Author(s): Dong Xu; Bingchu Cai; Guifu Ding; Yong Zhou; Aibin Yu; Li Wang; Xiaolin Zhao
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Paper Abstract

A novel micropump actuated by thin film shape memory alloy has been designed, fabricated and tested. It is one of the membrane reciprocating micropumps which is driven by shape recoverable force of NiTi thin film and biasing force of Si membrane. The micropump is composed of a deformable chamber and two Si flap check valves. The structure of pump is simple. The pump was manufactured by Si surface and bulk micromachining technologies, Au-Si eutectic and epoxy bonding. The outer dimension of the micropump is 6*6*1.5 mm/mm/mm. The NiTi/Si composite actuator has an area of 3*3mm/mm with a thickness of 20micrometers Testing result show that the pump has extremely good performance, such as high pumping yield, low power consumption high working frequency. All these advantages are attributed to the patterning of NiTi thin film used as self-heating element and optimizing design of NiTi/Si actuated structure.

Paper Details

Date Published: 29 September 1999
PDF: 7 pages
Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364466
Show Author Affiliations
Dong Xu, Shanghai Jiao Tong Univ. (China)
Bingchu Cai, Shanghai Jiao Tong Univ. (China)
Guifu Ding, Shanghai Jiao Tong Univ. (China)
Yong Zhou, Shanghai Jiao Tong Univ. (China)
Aibin Yu, Shanghai Jiao Tong Univ. (China)
Li Wang, Shanghai Jiao Tong Univ. (China)
Xiaolin Zhao, Shanghai Jiao Tong Univ. (China)

Published in SPIE Proceedings Vol. 3891:
Electronics and Structures for MEMS
Neil W. Bergmann; Olaf Reinhold; Norman C. Tien, Editor(s)

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