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Proceedings Paper

Versatile microsensor for micromachine applications
Author(s): Pei Lin Yu; Ronald B. Zmood
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Paper Abstract

Most conventional eddy current sensors are used for position measurements where the target approaches the sensor coil along its axial direction. In this paper we investigate a versatile eddy current micro sensor that can not only be used for measuring displacements parallel to the axis of the sensor coil but also for transverse displacement measurement in micro magnetic bearings for micro machines. In the transverse mode, the sensor coil impedance variation has been typically found to be less than when used in the axial mode. A number of approaches and techniques have been investigated and will be discussed to overcome the problem of low sensitivity. As a result a versatile eddy current sensor has been developed which is suitable for transverse position measurement in micro magnetic bearings. Experimental results shown that micro sensor sensitivities up to 20mV/micrometers can be achieved when the target moves between two sensor coils. The performance of the micro sensor suggests that it will have considerable scope for application in the micro machine are.

Paper Details

Date Published: 29 September 1999
PDF: 7 pages
Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364438
Show Author Affiliations
Pei Lin Yu, Royal Melbourne Institute of Technology (Australia)
Ronald B. Zmood, Royal Melbourne Institute of Technology (Israel)

Published in SPIE Proceedings Vol. 3891:
Electronics and Structures for MEMS
Neil W. Bergmann; Olaf Reinhold; Norman C. Tien, Editor(s)

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