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Proceedings Paper

Vibration measurement of microstructures by means of laser-optical modal analysis
Author(s): Rene Schnitzer; Norbert Ruemmler; Volker Grosser; Bernd Michel
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Paper Abstract

Investigation of the vibrational behavior under operating conditions are often necessary for realization and inspection of sensor and actuator functions even to assure of there high reliability. Also the behavior under separate excitations is important to know especially for applications of sensors and actuators into vibrating environments. Relating to this exceptionally high demands are exemplary required for aviation, automotive industries, and mechanical engineering. The paper describes the coupling of a Single-Point Laser Vibrometer with a Modal Analysis System. Beside detection of eigenfrequencies a contactless determination of mode shapes is possible too. For vibrational characterization of scanning micromirrors were to investigate both the vibrational behavior under operating conditions and under separate excitation. Gradual improvements to develop an appropriate test stand for vibration measurements at these microstructures are represented. Also measurements taken with Laserscanning Vibrometry and Holographic Interferometry are discussed. Results of Laseroptical Modal Analysis could serve as foundation for calculations and numerical simulations.

Paper Details

Date Published: 15 September 1999
PDF: 8 pages
Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364305
Show Author Affiliations
Rene Schnitzer, Chemnitzer Werkstoffmechanik GmbH (Germany)
Norbert Ruemmler, Chemnitzer Werkstoffmechanik GmbH (Germany)
Volker Grosser, Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany)
Bernd Michel, Fraunhofer-Institut fuer Zuverlaessigkeit und Mikrointegration (Germany)

Published in SPIE Proceedings Vol. 3825:
Microsystems Metrology and Inspection
Christophe Gorecki, Editor(s)

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