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Proceedings Paper

Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining
Author(s): Christophe Gorecki
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Paper Abstract

This paper presents the design and the fabrication steps of a novel integrated Mach-Zehnder interferometer with a phase modulation. A well-controlled Si machining as well as ZnO thin-film transducer integration on the same Silicon substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation of 1.3 rad.

Paper Details

Date Published: 15 September 1999
PDF: 6 pages
Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364302
Show Author Affiliations
Christophe Gorecki, Univ. de Franche-Comte (France)

Published in SPIE Proceedings Vol. 3825:
Microsystems Metrology and Inspection
Christophe Gorecki, Editor(s)

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