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Proceedings Paper

Qualification of optical measurement techniques for the investigation of material parameters of microcomponents
Author(s): Wolfgang Osten; Werner P. O. Jueptner; Soenke Seebacher; Torsten Baumbach
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Paper Abstract

The growing development of modern microcomponents, structures and systems, makes it necessary to qualify large-scale approved measurement methods for the investigation in micro- scales. New materials and structural design are employed whose behavior cannot be easily predicted by FE-methods. Material properties and boundary conditions which are known form large- scale investigations may differ considerably for components with micro-scale dimensions. Other problems are due to the high aspect ratio of the micro structures which makes it necessary to consider the real shape of the component especially for reliability studies. Consequently a wide field has been opened for optical and dimensional metrology with respect to the investigation of microcomponents. Many methods which were tested successfully at big components can be used for microcomponents, too. But new ways must be followed especially in the field of loading, handling and observing micro-scale components. The article deals with optical techniques which have proven to be useful for the investigation of large-scale components and their qualification for the investigation of microcomponents. For the discussion the 3 problem classes mentioned above are taken into account.

Paper Details

Date Published: 15 September 1999
PDF: 13 pages
Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364297
Show Author Affiliations
Wolfgang Osten, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Werner P. O. Jueptner, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Soenke Seebacher, Bremer Institut fuer Angewandte Strahltechnik (Germany)
Torsten Baumbach, Bremer Institut fuer Angewandte Strahltechnik (Germany)

Published in SPIE Proceedings Vol. 3825:
Microsystems Metrology and Inspection
Christophe Gorecki, Editor(s)

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