Novel optical and optoelectronic technologies make it possible to provide real-time, highly precise metrological tools for microsystems fabrication. Custom light sources with unprecedented efficiency, polymer replication of micro-optical components, optical monoblocks of glass or polymers comprising many optical functions, assembly techniques adopted from microelectronics and smart CMOS photosensors are the basis of this development. It is illustrated with three practical examples: (1) An absolute, high-precision, low-cost optical encoder, (2) low-noise, low-power and high-speed minicameras, and (3) real-time range imaging with micron resolution based on low-coherence optical tomography.

Date Published: 15 September 1999
PDF: 7 pages
Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); doi: 10.1117/12.364291

Published in SPIE Proceedings Vol. 3825:
Microsystems Metrology and Inspection
Christophe Gorecki, Editor(s)