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Proceedings Paper

SOLEXIS software scattering and reflectance data interface
Author(s): Susan H. C. P. McCall; Simon Lai; Marshall L. McCall
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Paper Abstract

An data interface is proposed that will port Bidirectional Scattering Distribution Function (BSDF) data, spectral reflectance, transmittance, and absorptance data from SORIC's software database for PC-based computers, SOLEXICTM, to: commercial optical design and analysis software (i.e. ASAP, TraceProTM, OptiCADTM, OSLO, ZEMAX, ZELUMTM and others); and from both scatterometers employing the ASTM standard format of BSDF data (e.g. CASI Scatterometer) and scatterometers using non standard formats.

Paper Details

Date Published: 27 September 1999
PDF: 8 pages
Proc. SPIE 3780, Optical Design and Analysis Software, (27 September 1999); doi: 10.1117/12.363780
Show Author Affiliations
Susan H. C. P. McCall, Stellar Optics Research International Corp. (Canada)
Simon Lai, LYZ Consulting Inc. (Canada)
Marshall L. McCall, York Univ. (Canada)

Published in SPIE Proceedings Vol. 3780:
Optical Design and Analysis Software
Richard C. Juergens, Editor(s)

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