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Proceedings Paper

Methods to remove distortion artifacts in scanned projections
Author(s): Andrew R. Kalukin; Zachary H. Levine; Charles Tarrio; Sean P. Frigo; Ian McNulty; Y. Y. Wang; Cornelia C. Retsch; Markus Kuhn; Barry L. Winn
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Paper Abstract

Artifacts induced by distortions which sometimes occur in two- dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

Paper Details

Date Published: 22 September 1999
PDF: 9 pages
Proc. SPIE 3772, Developments in X-Ray Tomography II, (22 September 1999); doi: 10.1117/12.363726
Show Author Affiliations
Andrew R. Kalukin, SAIC, NIST, and Rensselaer Polytechnic Institute (United States)
Zachary H. Levine, National Institute of Standards and Technology (United States)
Charles Tarrio, National Institute of Standards and Technology (United States)
Sean P. Frigo, Argonne National Lab. (United States)
Ian McNulty, Argonne National Lab. (United States)
Y. Y. Wang, Argonne National Lab. and SUNY/Stony Brook (United States)
Cornelia C. Retsch, Argonne National Lab. (United States)
Markus Kuhn, Intel Corp. (United States)
Barry L. Winn, SUNY/Stony Brook (United States)

Published in SPIE Proceedings Vol. 3772:
Developments in X-Ray Tomography II
Ulrich Bonse, Editor(s)

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