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Proceedings Paper

Membrane deformable mirrors under cw laser load
Author(s): Gleb V. Vdovin; Nicolas Kugler; Martin Schacht
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Paper Abstract

Behavior of micromachined membrane deformable mirrors under continuous laser load has been investigated experimentally and theoretically. It was shown that load-induced variation of the membrane temperature and mechanical tension result in addition thermal deformation of the deformable mirror figure. Modeling the membrane tension and thermal deformation as functions of beam diameter, optical power and mirror design parameters, we found that the thermal resistance of the mirror substrate is critical for high- power operation. According to our estimations an optically- designed membrane mirror with 99.8 percent reflectivity can be safely loaded with up to 500W of optical power in a 10mm- diameter beam. This model was compared with experimental data obtained for micro-machined membrane deformable mirrors with five different types of reflective coatings loaded with up to 70W beam with power density of up to 20W/mm2. We also demonstrated operation of a multilayer membrane mirror in a stable resonator of a diode-pumped YAG:Nd laser with output power of up to 4.5W.

Paper Details

Date Published: 27 September 1999
PDF: 9 pages
Proc. SPIE 3762, Adaptive Optics Systems and Technology, (27 September 1999); doi: 10.1117/12.363601
Show Author Affiliations
Gleb V. Vdovin, Delft Univ. of Technology (Netherlands)
Nicolas Kugler, Laser- und Medizin-Technologie gGmbH (Germany)
Martin Schacht, Laser Components GmbH (Germany)

Published in SPIE Proceedings Vol. 3762:
Adaptive Optics Systems and Technology
Robert K. Tyson; Robert Q. Fugate, Editor(s)

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