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Proceedings Paper

Analogously working micromirror arrays
Author(s): Kersten Kehr; Steffen Kurth; Jan Mehner; Christian Kaufmann; Ramon Hahn; Wolfram Doetzel; Thomas Gessner
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Paper Abstract

This paper deals with micromirror arrays for high frequency applications. The use of monocrystalline silicon as mechanical material results in a low hysteresis, good reproducibility and high reliability. General characteristics, advantages and limitations of large analogously working mirror arrays in comparison with single elements will be discussed with respect to the requirements of desired applications. Special aspects of the design of micromirror arrays, experimental results concerning the behavior of the electromechanical system and optical properties will be presented as well. It will be shown that cascaded elements allow beside higher quality factors or resonant band width concerning the dynamic behavior also higher quasistatic deflection angles at diminished electrode gaps and lower driving voltages.

Paper Details

Date Published: 2 September 1999
PDF: 10 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361292
Show Author Affiliations
Kersten Kehr, Chemnitz Univ. of Technology (Germany)
Steffen Kurth, Chemnitz Univ. of Technology (Germany)
Jan Mehner, Chemnitz Univ. of Technology (Germany)
Christian Kaufmann, Chemnitz Univ. of Technology (Germany)
Ramon Hahn, Chemnitz Univ. of Technology (Germany)
Wolfram Doetzel, Chemnitz Univ. of Technology (Germany)
Thomas Gessner, Chemnitz Univ. of Technology (Germany)

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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