This paper deals with micromirror arrays for high frequency applications. The use of monocrystalline silicon as mechanical material results in a low hysteresis, good reproducibility and high reliability. General characteristics, advantages and limitations of large analogously working mirror arrays in comparison with single elements will be discussed with respect to the requirements of desired applications. Special aspects of the design of micromirror arrays, experimental results concerning the behavior of the electromechanical system and optical properties will be presented as well. It will be shown that cascaded elements allow beside higher quality factors or resonant band width concerning the dynamic behavior also higher quasistatic deflection angles at diminished electrode gaps and lower driving voltages.

Date Published: 2 September 1999
PDF: 10 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361292

Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)