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Proceedings Paper

Optical characteristics of PZT thin film actuator-driven micro-optical scanning sensor with multilayer stacked device structure
Author(s): Hiromi Totani; Masaaki Ikeda; Akira Akiba; Takahiro Masuda; Hiroshi Goto; Mikio Matsumoto
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Paper Abstract

We developed a micro optical scanning sensor with the dimension of 2.0 mm X 4.0 mm X 3.0 mm for a micro inspection robot. In this sensor, the functional elements such as a laser diode (light source), photo diodes, pin-holes, a beam splitter, a ball lens, and a PZT thin film actuator driven micro optical scanner are integrated on separate substrates each consisting a functional modules and the substrates are stacked. Performance of the optical sensor depends on its optical characteristics. This sensor has spot size of output beam is 256 micrometer X 580 micrometer at 60 mm from the sensor, output power is 0.5 mW, optical scanning angles are plus or minus 10 deg. two-dimensionally, and detecting sensitivity of photo diodes are 0.3 A/W. The sensor is capable of distance measurement between the sensor and an object at 50 mm plus or minus 10 mm and the object shape recognition two-dimensionally based on the optical scanning method. By using these functions, the sensor can measure dimensions of the object and measuring resolution is less than 0.5 mm.

Paper Details

Date Published: 2 September 1999
PDF: 8 pages
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361262
Show Author Affiliations
Hiromi Totani, OMRON Corp. (Japan)
Masaaki Ikeda, OMRON Corp. (Japan)
Akira Akiba, OMRON Corp. (Japan)
Takahiro Masuda, OMRON Corp. (Japan)
Hiroshi Goto, OMRON Corp. (Japan)
Mikio Matsumoto, OMRON Corp. (Japan)


Published in SPIE Proceedings Vol. 3878:
Miniaturized Systems with Micro-Optics and MEMS
M. Edward Motamedi; Rolf Goering, Editor(s)

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