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Proceedings Paper

Micropattern fabrication by a specially designed microtool
Author(s): Isamu Aoki; Toshinori Takahashi
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Paper Abstract

We have been investigating microforming techniques suitable for fabricating metal microcomponents. In this study, we used a microcutting-technology system equipped with a newly designed special shape cutting tool. As the shape of ordinary end-mills is complex, small dimensional sizes are more difficult to fabricate. This means that the microcutting of 3D components is also difficult. To overcome this problem, we proposed a simple oblique-cut micromill to be used exclusively for micromachining. A precision cutting device was also designed. The oblique-cut micromill is driven by a high-speed spindle motor of 50,000-10,000 rpm supported by air bearings. Results of experiments show that certain micropatterns can be fabricated on aluminum wire. Narrow parts of patterns that are 15-25 micrometers wide can also be fabricated. These results indicate that the system can be used to create 3D free-form micropatterns. In this paper, we report the result of the development of the micromill, machining system, and some fabricated items.

Paper Details

Date Published: 30 August 1999
PDF: 8 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361241
Show Author Affiliations
Isamu Aoki, Kanagawa Univ. (Japan)
Toshinori Takahashi, Saitama Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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