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Proceedings Paper

High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive coils, and folded helical springs
Author(s): James L. Maxwell; Mats Boman; Kirk Williams; Kajsa Larsson; N. Jaikumar; G. Saiprasanna
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Paper Abstract

This paper reports advances in high-pressure, 3D laser chemical vapor deposition, which may be used to prototype insulating and metallic high-aspect-ratio microstructures. In this case, carbon was grown from ethylene at pressures of 1-11 bar; fine free-standing fibers of diamond-like carbon were grown at linear rates exceeding 120,000 microns per second. This record-setting growth rate allows the computer- controlled prototyping of centimeter-scale structures in only 15-20 minutes. The volumetric growth rate is scalable in pressure and laser power so that, with a single tool, micron-size details may be deposited as readily as large objects. The morphology, diameter, and steady-state growth rate of the carbon fibers were mapped versus the input laser power, the pre-cursor pressure, and the gas flow rate. Using a rotating mandrel, helical, tapered, and folded coils were grown at rates of 10-25 micrometers /s. Flat carbon coils were also grown by steadily increasing the radius of the laser focus from the mandrel while maintaining a constant tangential velocity. Tungsten fibers and single crystals were also grown from WF6 and H2 gas mixtures.

Paper Details

Date Published: 30 August 1999
PDF: 9 pages
Proc. SPIE 3874, Micromachining and Microfabrication Process Technology V, (30 August 1999); doi: 10.1117/12.361225
Show Author Affiliations
James L. Maxwell, Louisiana Tech Univ. (United States)
Mats Boman, Uppsala Univ. (Sweden)
Kirk Williams, Louisiana Tech Univ. (United States)
Kajsa Larsson, Uppsala Univ. (Sweden)
N. Jaikumar, Louisiana Tech Univ. (United States)
G. Saiprasanna, Louisiana Tech Univ. (United States)

Published in SPIE Proceedings Vol. 3874:
Micromachining and Microfabrication Process Technology V
James H. Smith; Jean Michel Karam, Editor(s)

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