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Proceedings Paper

Computer simulation of optical coating deposition monitored by transmission turning point
Author(s): Xiaohui Zhang; Weiming Zhu; Xiaoping Li; Qingming Chen
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Paper Abstract

The relations between the precision of the transmittance turning point monitoring system and the thickness error of the monitored thin film layer are analyzed in this paper. The functions are derived under different conditions. This paper has developed a program to simulate the structures of deposited coatings and the real-time variation of the transmittance through the thin film stake and substrate assembly in deposition process that take the transmission turning point monitoring approach. The simulated value of the thickness of each layer after deposition is composed of the thickness correspond to the transmittance extreme found by 1D search algorithm and random thickness error calculated by the relations mentioned above. The computer simulation accord with the experiment results.

Paper Details

Date Published: 8 September 1999
PDF: 4 pages
Proc. SPIE 3862, 1999 International Conference on Industrial Lasers, (8 September 1999); doi: 10.1117/12.361097
Show Author Affiliations
Xiaohui Zhang, Huazhong Univ. of Science and Technology (China)
Weiming Zhu, Huazhong Univ. of Science and Technology (China)
Xiaoping Li, Huazhong Univ. of Science and Technology (China)
Qingming Chen, Huazhong Univ. of Science and Technology (China)

Published in SPIE Proceedings Vol. 3862:
1999 International Conference on Industrial Lasers
Fuxi Gan; Horst Weber; Zaiguang Li; Qingming Chen, Editor(s)

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