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Proceedings Paper

Micromachined e-plane filter for w-band operation
Author(s): A. Champion; Fatima Masot; David Paul Steenson; Robert E. Miles
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Paper Abstract

In this paper we describe the realization and electrical performance of a micromachined E-plane filter for operation at a central frequency of 90 GHz. The micro-machining technique employed here for the filter fabrication is based on the use of an ultra-thick photoresist, the EPON SU-8, which gives precise control of 2D and 3D structures at the 1-100 micrometers level. In the work described her, the E-plane ladder was micromachined and mounted in a conventional metal waveguide for electrical characterization purposes. The results show that the performance of the micromachined filter is comparable to its metal counterpart, with the additional advantages of a much lighter structure, greater ease of fabrication and at lower cost.

Paper Details

Date Published: 9 September 1999
PDF: 5 pages
Proc. SPIE 3828, Terahertz Spectroscopy and Applications II, (9 September 1999); doi: 10.1117/12.361068
Show Author Affiliations
A. Champion, Univ. of Leeds (United Kingdom)
Fatima Masot, Univ. of Leeds and Univ. de Sevilla (United Kingdom)
David Paul Steenson, Univ. of Leeds (United Kingdom)
Robert E. Miles, Univ. of Leeds (United Kingdom)

Published in SPIE Proceedings Vol. 3828:
Terahertz Spectroscopy and Applications II
J. Martyn Chamberlain, Editor(s)

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