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Proceedings Paper

Optical properties of ZnSe diffractive optical elements for spot array generation
Author(s): Keiji Ebata; Keiji Fuse; Manabu Shiozaki; Tetsuya Hattori
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Paper Abstract

The diffractive optical element (DOE) is a revolutionary technology for sophisticated optical systems. It has recently been launched within the optical industry, which is constantly seeking improvements over conventional optics. We have designed and fabricated three types of binary-phase DOE for array generation. The surface relief of a ZnSe substrate was patterned and etched with each intended phase distribution by using photolithography and reactive ion etching (RIE) technologies. The optical properties of anti-reflection coated samples were then examined by measuring the intensity distribution of their converging diffractive beams and the results compared with the calculated beam propagation.

Paper Details

Date Published: 9 September 1999
PDF: 11 pages
Proc. SPIE 3823, Laser Metrology and Inspection, (9 September 1999); doi: 10.1117/12.360992
Show Author Affiliations
Keiji Ebata, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Fuse, Sumitomo Electric Industries, Ltd. (Japan)
Manabu Shiozaki, Sumitomo Electric Industries, Ltd. (Japan)
Tetsuya Hattori, Sumitomo Electric Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 3823:
Laser Metrology and Inspection
Hans J. Tiziani; Pramod Kumar Rastogi, Editor(s)

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