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Proceedings Paper

Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking
Author(s): Yee Loy Lam; Jian Liu; Gu Tan; Yuen Chuen Chan; Yan Zhou
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Paper Abstract

In this paper, we report our success in the fabrication of optical diffractive gratings by means of direct embossing on sol-gel derived glasses. The sol-gel glass film is derived from composite organic-inorganic material with spin-coating. No baking is required during the whole processing. As a preliminary result, the grating with a period of 1.102 micrometers and a thickness of 57.2 micrometers has been successfully fabricated. Our experiments provide a simple and low temperature approach for fabricating optical gratings useful in integrated optics.

Paper Details

Date Published: 31 August 1999
PDF: 5 pages
Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360532
Show Author Affiliations
Yee Loy Lam, Nanyang Technological Univ. (Singapore)
Jian Liu, Nanyang Technological Univ. (Singapore)
Gu Tan, Nanyang Technological Univ. (Singapore)
Yuen Chuen Chan, Nanyang Technological Univ. (Singapore)
Yan Zhou, Nanyang Technological Univ. (Singapore)

Published in SPIE Proceedings Vol. 3879:
Micromachine Technology for Diffractive and Holographic Optics
Sing H. Lee; J. Allen Cox, Editor(s)

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