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Proceedings Paper

Linear arrays of uncoolded poly SiGe microbolometers for IR detection
Author(s): Piet De Moor; Sherif Sedky; Deniz Sabuncuoglu; Chris A. Van Hoof
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Paper Abstract

In this work we demonstrate the advantages of using polycrystalline silicon germanium (poly SiGe) as a structural material for surface micromachined devices, and more specifically uncooled Infra-Red (IR) microbolometers. The low stress and the low thermal conductivity of poly SiGe enable the realization of IR microbolometers having an effective detectivity above 2 X 109 cm.Hz1/2/W. Currently, linear arrays of optimized devices included in an on-chip vacuum package are developed. The vapor HF sacrificial etching technique is used to release extremely thin microbolometers with high yield. Combined with the practical advantage of an uncooled system, a low-cost yet sensitive sensor system is the result. Possible applications include space based pushbroom earth sensing, spectral environmental monitoring and process control.

Paper Details

Date Published: 31 August 1999
PDF: 4 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360502
Show Author Affiliations
Piet De Moor, IMEC (Belgium)
Sherif Sedky, IMEC (Belgium) and Cairo Univ. (Egypt)
Deniz Sabuncuoglu, IMEC (Belgium) and Middle East Technical Univ. (Turkey)
Chris A. Van Hoof, IMEC (Belgium)

Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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