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Proceedings Paper

Production-ready silicon microvalve
Author(s): Tak K. Wang; Phillip W. Barth; Rod Alley; James Baker; David Yates; Leslie A. Field; Gary Gordon; Christopher C. Beatty; Lori Tully
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Paper Abstract

Micromachining is envisioned as an enabling technology for the miniaturization of chemical analysis systems. It has been pursued for gas phase analysis (GPA) in HP's Chemical Analysis Group and at HP Labs. A thermally actuated, silicon micromachined gas control valve has been jointly developed at HPL and Little Falls Analytical Division (LFAD) for use in a gas chromatograph. This microvalve has 1/10 the weight and 1/5 the package volume of competing solenoid valves. This low cost, high reliability, proportional gas control valve reduces the cost, weight and size of a crucial component for a gas chromatograph system. This paper discusses valve structure and performance, and the resolution of issues over the course of the development.

Paper Details

Date Published: 31 August 1999
PDF: 11 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360498
Show Author Affiliations
Tak K. Wang, Hewlett-Packard Co. (United States)
Phillip W. Barth, Hewlett-Packard Co. (United States)
Rod Alley, Hewlett-Packard Co. (United States)
James Baker, Hewlett-Packard Co. (United States)
David Yates, Hewlett-Packard Co. (United States)
Leslie A. Field, Hewlett-Packard Co. (United States)
Gary Gordon, Hewlett-Packard Co. (United States)
Christopher C. Beatty, Hewlett Packard Co. (United States)
Lori Tully, Hewlett-Packard Co. (United States)

Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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