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Proceedings Paper

Programmable micro accelerometers and gyroscopes
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Paper Abstract

The integration of MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna to realize a programmable accelerometers and gyroscopes is presented in this paper. This unique combination of technologies results in novel conformal sensors that can be remotely sensed by an RF system with the advantage of no power requirements at the sensor site. Hybrid Programmable accelerometers and gyroscopes on a single chip are useful for inertial navigation systems. Programmable sensors are achieved with splitfinger interdigital transducers (IDTs) as reflecting structures. If IDTs are short-circuited or capacitively loaded, the wave propagates without any reflection whereas in an open circuit configuration, the IDTs reflect the incoming SAW signal. The programmable accelerometers and gyroscopes can thus be achieved by using an external circuitry on a semiconductor chip using hybrid technology.

Paper Details

Date Published: 31 August 1999
PDF: 10 pages
Proc. SPIE 3876, Micromachined Devices and Components V, (31 August 1999); doi: 10.1117/12.360484
Show Author Affiliations
Vijay K. Varadan, The Pennsylvania State Univ. (United States)
Vasundara V. Varadan, The Pennsylvania State Univ. (United States)

Published in SPIE Proceedings Vol. 3876:
Micromachined Devices and Components V
Patrick J. French; Eric Peeters, Editor(s)

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