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Proceedings Paper

Characterization of micromachined structures: comparison of measurement and theory
Author(s): Steven C. Aceto; Adolfo O. Gutierrez; Michelle D. Simkulet; Thomas W. Krawczyk Jr.; Michael Lienhard; Andrew Lundgren; Brandon Houghton; David Patti
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Paper Abstract

Using the MEMSPEC-2000TM prototype test station, several micromachined structures have been characterized. The MEMSPEC-2000TM test station employs a laser based non- contact measurement technique to determine the 3D profile of the test structure. Vertical resolution of 0.1 micron and lateral resolution of approximately 1 micron can be achieved. The bandwidth of the sensor is DC to 100 kHz, allowing for time domain measurements of moving structures to be made. Standard static surface profiles have been measured for a number of varied types of test structures. The results of these measurements will be compared with design values. The time response of activated test structures will also be presented and compared to the theoretical predictions based upon modeling equations.

Paper Details

Date Published: 3 September 1999
PDF: 9 pages
Proc. SPIE 3875, Materials and Device Characterization in Micromachining II, (3 September 1999); doi: 10.1117/12.360474
Show Author Affiliations
Steven C. Aceto, InterScience, Inc. (United States)
Adolfo O. Gutierrez, InterScience, Inc. (United States)
Michelle D. Simkulet, InterScience, Inc. (United States)
Thomas W. Krawczyk Jr., InterScience, Inc. (United States)
Michael Lienhard, InterScience, Inc. (United States)
Andrew Lundgren, InterScience, Inc. (United States)
Brandon Houghton, InterScience, Inc. (United States)
David Patti, InterScience, Inc. (United States)

Published in SPIE Proceedings Vol. 3875:
Materials and Device Characterization in Micromachining II
Yuli Vladimirsky; Craig R. Friedrich, Editor(s)

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