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Proceedings Paper

Proposal of new layout data format for LSI patterns
Author(s): Isao Ashida; Yutaka Sato; Hiroichi Kawahira
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Paper Abstract

A new LSI layout format LPX (LSI Layout Pattern data Transfer format) applicable to below 0.18 micrometer device generation is proposed. The format is assigned to omit redundant expressions of the GDS-II Stream format. The expression of LPX format uses features of LSI pattern data, and performance of compaction is higher than that of 'gzip,' the famous byte bases data compression tool, the compaction rate with LPX is 0.15, while that with 'gzip' is 0.19. The processing time of conversion to LPX from GDS-II Stream file running with a PentiumPro 200 MHz is 45% shorter than that with 'gzip,' and output file size is 21% smaller than that as well.

Paper Details

Date Published: 25 August 1999
PDF: 9 pages
Proc. SPIE 3748, Photomask and X-Ray Mask Technology VI, (25 August 1999); doi: 10.1117/12.360192
Show Author Affiliations
Isao Ashida, Sony Corp. (Japan)
Yutaka Sato, Sony Corp. (Japan)
Hiroichi Kawahira, Sony Corp. (Japan)

Published in SPIE Proceedings Vol. 3748:
Photomask and X-Ray Mask Technology VI
Hiroaki Morimoto, Editor(s)

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