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Proceedings Paper

Metrology of precision optical surfaces and laser mirrors: I
Author(s): Valentina V. Azarova; Igor Dronov; Aleksandr Karcev; Vlad Sharov; Konstantin Malickiy
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Paper Abstract

The comparison of different methods of measuring surface roughness parameters, i.e. angle-resolved scattering (ARS) technique and atomic force microscope (AFM) profilometry, was performed for quartz precise optical surfaces, obtained by different polishing processes. The functions of power spectral density, calculated form ARS, using vector scattering theory, and form AFM data are in good agreement in the range of polar scatter angles 30..75 degrees. In this range the angular scattering is well predicted using the exponential autocorrelation function with parameters, calculated from surface profile. The autocorrelation length, calculated from ARS data in above range using exponential statistics, remains practically constant for different surfaces, obtained by the same polishing process. The latter allows to consider it as the characteristic parameter of certain polishing process.

Paper Details

Date Published: 6 September 1999
PDF: 9 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360169
Show Author Affiliations
Valentina V. Azarova, Polyus Research and Development Institute (Russia)
Igor Dronov, A.F. Ioffe Physical-Technical Institute (Russia)
Aleksandr Karcev, A.F. Ioffe Physical-Technical Institute (Russia)
Vlad Sharov, A.F. Ioffe Physical-Technical Institute (Russia)
Konstantin Malickiy, A.F. Ioffe Physical-Technical Institute (Russia)

Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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