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Proceedings Paper

Aspheric optics at different quality levels and functional need
Author(s): Kurt B. Becker; Bernd Doerband; Roland Loercher; Michael Schmidt
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Paper Abstract

The design of optical systems gains profit from the application of aspheric elements: to correct for image aberrations, to reduce weight or system length or to cope with other functional needs like the number of reflections or the field size. Manufacturing, however, is suffering in practice from problems resulting from the reduced symmetry of the components as compared to spherical optics. Almost all large optical companies in the world are working on solving the problem of fabrication of accurate aspheric elements at reasonable cost. In this paper fabrication and metrology aspects of aspherical elements in the IR, visible, UV and EUV at Carl Zeiss and other companies will be discussed. The specifications achieved presently are ranging between some micrometers to nm for figure accuracy and 100nm to 0.1nm for microroughness.

Paper Details

Date Published: 6 September 1999
PDF: 12 pages
Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); doi: 10.1117/12.360130
Show Author Affiliations
Kurt B. Becker, Carl Zeiss (Germany)
Bernd Doerband, Carl Zeiss (Germany)
Roland Loercher, Carl Zeiss (Germany)
Michael Schmidt, Carl Zeiss (Germany)

Published in SPIE Proceedings Vol. 3739:
Optical Fabrication and Testing
Roland Geyl; Jonathan Maxwell, Editor(s)

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