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Proceedings Paper

UV-optical and microstructural properties of MgF2-coatings deposited by IBS and PVD processes
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Paper Abstract

In high quality otpical coating systems for the DUV-spectral range, MgF2 is one of the preferred deposition materials. MgF2-coatings exhibit relatively low optical losses as well as high stability and laser induced damage thresholds. In the present joint research effort of several European laboratories, the potentiality of MgF2 is evaluated in respect to the production of improved optical coatings for applications in laser technology and semiconductor lithography. For this purpose, single layers of MgF2 were deposited on superpolished fused silica and CaF2-substrates by ion beam sputtering, boat and e-beam evaporation in different laboratories. Besides photometric inspections, the samples were characterized by an optical scatter measurement facility at 193 nm and 633 nm. The structural properties were assessed using AFM, XRD, and adapted TEM-techniques invovling conventional thinning methods for the layers. For the measurement of mechanical stress in the coatings, special silicon substrates were coated and analyzed.

Paper Details

Date Published: 7 September 1999
PDF: 10 pages
Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); doi: 10.1117/12.360111
Show Author Affiliations
Detlev Ristau, Laser Zentrum Hannover (Germany)
Winfried Arens, Laser Zentrum Hannover (Germany)
Salvador Bosch, Univ. de Barcelona (Spain)
Angela Duparre, Fraunhofer Institut fuer Angewandte Optik und Feinmechanik (Germany)
Enrico Masetti, ENEA (Italy)
Damien Jacob, Univ. de Barcelona (Spain)
George Kiriakidis, Foundation for Research and Technology (Greece)
Francesca Peiro, Univ. de Barcelona (Spain)
Etienne Quesnel, CEA-LETI (France)
Alexander V. Tikhonravov, Moscow State Univ. (Russia)

Published in SPIE Proceedings Vol. 3738:
Advances in Optical Interference Coatings
Claude Amra; H. Angus Macleod, Editor(s)

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