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Proceedings Paper

Opto-micro-mechanical superresolution detector system
Author(s): Rainer Riesenberg; Thomas Seifert; Alexander Berka; Ulrich Dillner
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Paper Abstract

Often the digital resolution of optical systems is limited by the size of the pixels of detector arrays. To increase this lateral resolution an architecture with a new spatial light modulator is presented. A microstripe is moved across a detector. The microstripe shades off a small part of the detector surface thus providing an inverse opto- micromechanical scanning. Additional virtual subpixels are generated. The lateral resolution of the detector increases by the number of lateral shifts, which is experimentally demonstrated up to factor of 30. The concept includes a throughput or multiplex advantage. For enhanced resolution the signal to noise ratio nearly does not decrease in the case of thermal like noise. The microstripe array is prepared by micromachining technology, the thickness of the stripes is 1...2 micrometers , the width is 3 micrometers ...1 mm and length is up to 2 mm.

Paper Details

Date Published: 27 August 1999
PDF: 8 pages
Proc. SPIE 3737, Design and Engineering of Optical Systems II, (27 August 1999); doi: 10.1117/12.360031
Show Author Affiliations
Rainer Riesenberg, Institute for Physical High Technology (Germany)
Thomas Seifert, Institute for Physical High Technology (Austria)
Alexander Berka, Institute for Physical High Technology (Germany)
Ulrich Dillner, Institute for Physical High Technology (Germany)

Published in SPIE Proceedings Vol. 3737:
Design and Engineering of Optical Systems II
Fritz Merkle, Editor(s)

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