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Proceedings Paper

Enhanced-resolution Michelson interferometer for displacement measurement
Author(s): Jing Su; Timothy N. Chang
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Paper Abstract

Intensity division interferometers have been long used in displacement measurement with resolution down to 0.01 micron. However, commercial multi-frequency laser interferometers are very expensive and difficult to be embedded in motion control experiments. In this paper, a single frequency Michelson interferometer combined with an 128 X 1 intensity integration photodiodes to produce a high resolution and wide range displacement detection is presented. With the digital signal microprocessor, plus signal filtering technique, the displacement changes to wavelength/2 has been measured by using PZT stack with high voltage driver. With the He-Ne laser as the light source, the precision is about 0.3 micron, the change pattern of the peak maximum of the fringes corresponding to the change pattern of the PZT driving signal, and the best results are obtained with sine-wave at different frequencies. This system has the features of high resolution, broadband, non- contact measurement. Because of lower cost, easier implementation, faster DSP processing, it is very likely to be embedded in the concurrent control system.

Paper Details

Date Published: 20 August 1999
PDF: 7 pages
Proc. SPIE 3833, Intelligent Systems in Design and Manufacturing II, (20 August 1999); doi: 10.1117/12.359514
Show Author Affiliations
Jing Su, Rutgers Univ. (United States)
Timothy N. Chang, New Jersey Institute of Technology (United States)

Published in SPIE Proceedings Vol. 3833:
Intelligent Systems in Design and Manufacturing II
Bhaskaran Gopalakrishnan; San Murugesan, Editor(s)

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