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Proceedings Paper

Developing a low-cost accelerometer for implantable pacemakers
Author(s): Lary R. Larson; David Ruben; Mark Henschel; Sarah A. Audet
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Paper Abstract

The M beam device described herein is a surface mount accelerometer. This device is built from commonly available piezo material using a novel packaging approach that resolves many of the issues that make competing accelerometers expensive. The concept includes separating the piezo material into active and inactive areas by sawing the piezo material into an M shape. The two outer legs are used for package connection (inactive area) and the inner leg is free to move as a piezoelectric beam (active area). The design equations for M beam characteristics are presented.

Paper Details

Date Published: 18 August 1999
PDF: 7 pages
Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); doi: 10.1117/12.359373
Show Author Affiliations
Lary R. Larson, Micro-Rel Inc. (United States)
David Ruben, Micro-Rel Inc. (United States)
Mark Henschel, Micro-Rel Inc. (United States)
Sarah A. Audet, Micro-Rel Inc. (United States)

Published in SPIE Proceedings Vol. 3880:
MEMS Reliability for Critical and Space Applications
Russell A. Lawton; William M. Miller; Gisela Lin; Rajeshuni Ramesham, Editor(s)

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