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Proceedings Paper

Microassembly and microbonding in Nano Manufacturing World
Author(s): Kensuke Tsuchiya; Akihiro Murakami; Gustavo Fortmann; Masayuki Nakao; Yotaro Hatamura
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Paper Abstract

The authors are developing a table top factory, which is called ` Nano Manufacturing World (NMW)', in order to make 3D micro structures for information devices or medical tools. In this paper, we demonstrate a pick-and-place task of micro objects using an electric charged tool under SEM observation, and bonding task of them using a pencil-type semiconductor laser in vacuum. In NMW, we installed the electric changed tool in its right hand, the semiconductor laser in its left hand, and micro objects on its table. As if we were in a nano-scale world, we can operate the micro tasks.

Paper Details

Date Published: 18 August 1999
PDF: 9 pages
Proc. SPIE 3834, Microrobotics and Microassembly, (18 August 1999); doi: 10.1117/12.357817
Show Author Affiliations
Kensuke Tsuchiya, Univ. of Tokyo (Japan)
Akihiro Murakami, Univ. of Tokyo (Japan)
Gustavo Fortmann, Univ. of Tokyo (Japan)
Masayuki Nakao, Univ. of Tokyo (Japan)
Yotaro Hatamura, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 3834:
Microrobotics and Microassembly
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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