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Proceedings Paper

Fabrication and metrology of km-scale radii on surfaces of master tooling
Author(s): Achim J. Leistner; Bozenko F. Oreb; Jeffrey A. Seckold; Christopher J. Walsh
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Paper Abstract

The Laser Interferometer Gravitational-wave Observatory (LIGO) core optical components have been manufactured by CSIRO. These optical substrates are optically polished on a lap surface that is made of Teflon coated onto a thick rigid faceted Zerodur base. To produce the km-scale radii (> 10 km) on these substrates the lap surface is shaped by abrading it with a fine ground silica plate whose radius of curvature corresponds to the one specified for the LIGO component. The plates are measured by a commercial phase stepping interferometer which is used in a grazing incidence arrangement. We describe the process of shaping and measuring the conditioning plates and laps.

Paper Details

Date Published: 17 August 1999
PDF: 8 pages
Proc. SPIE 3745, Interferometry '99: Applications, (17 August 1999); doi: 10.1117/12.357762
Show Author Affiliations
Achim J. Leistner, CSIRO (Australia)
Bozenko F. Oreb, CSIRO (Australia)
Jeffrey A. Seckold, CSIRO (Australia)
Christopher J. Walsh, CSIRO (Australia)

Published in SPIE Proceedings Vol. 3745:
Interferometry '99: Applications
Werner P. O. Jueptner; Krzysztof Patorski, Editor(s)

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